In-line Wideband RF MEMS Switch Integrated on PCB Using BCB Planarization

Authors

Keywords:

Flexible printed circuits, Microelectromechanical systems, Microfabrication, Radiofrequency microelectromechanical systems

Abstract

In this paper, the design, fabrication, and characterization of a wideband cantilever RF-MEMS coplanar line switch with metal-to-metal contact are presented. Printed circuit board (PCB) processing techniques and benzocyclobutene (BCB) as planarization material were used to integrate the RFMEMS switch to a microwave-friendly substrate. The proposed fabrication process was developed at low-temperature (< 210 °C) and combines layers of BCB, photoresist and copper. The process is relatively simple, comparatively inexpensive, and it implies a wide usage of BCB as planarization material to reduce the surface roughness of the cantilever beam, enabling a high repeatability of the fabricated MEMS switches. This low-cost fabrication process was used to develop a switch with low actuation voltage, and acceptable levels of insertion loss and isolation in the frequency band from DC to 20 GHz. The fabricated switch demonstrated isolation higher than 13.1 dB and insertion loss lower than 0.63 dB in the frequency range from DC up to 12 GHz. In frequencies from 12 to 20 GHz, the insertion loss is lower than 1.16 dB and the isolation is higher than 9.6 dB. The pull-in voltage was 30 V with measured commutation time of 425 µs. This RF-MEMS switch is suitable to be monolithically integrated with printed circuits on flexible microwave-friendly substrates.

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Author Biographies

Ignacio Cuauhtemoc Benitez Zuñiga, Universidad Nacional Autonoma de Mexico. CdMx, 04510, Mexico

I. C. Benitez-Zuñiga was born in Mexico City, Mexico. He received his B. S. and M. Eng. Degrees in electrical and electronic engineering from the National Autonomous University of Mexico (UNAM), Mexico City in 2012 and 2016, respectively. Currently, he is pursuing a Ph.D. degree at the Faculty of Engineering, UNAM. Since 2012, he has been a professor at the National School College of Sciences and Humanities, Pre-University School, UNAM. His research interests include RF MEMS, phased array antennas and millimeter-wave devices.

Alexander E. Martynyuk, Universidad Nacional Autonoma de Mexico. CdMx, 04510, Mexico

A. E. Martynyuk was born in Kiev, Ukraine. He received an M. Sc. Degree in radio engineering in 1988 from Kiev Polytechnic Institute, Ukraine, and Ph. D. degree in 1993 from same institute. Since 1988 to 1995, he was with the Faculty of Radio Engineering of the Kiev Polytechnic Institute. Since 1995 he has been with the National Autonomous University of Mexico (UNAM), Mexico City. He is currently a professor at the Faculty of Engineering, UNAM. His research interests include microwave and millimeter-wave devices, antenna arrays and millimeter-wave communications.

Jose Ismael Martinez-Lopez, Universidad Nacional Autonoma de Mexico. CdMx, 04510, Mexico

J. I. Martinez-Lopez was born in Mexico City, Mexico. He received his B.S., M.Eng., and Ph.D. degrees in electrical engineering from the National Autonomous University of Mexico (UNAM), Mexico City, in 1994, 1998, and 2005, respectively. In 2006, he was with the Schlumberger Technology Center, Sugar Land, TX, USA, where he worked to develop antennas for deep induction array tools for the oil industry. In 2009, he was a Visiting Scholar with the Electroscience Laboratory, at The Ohio State University (OSU), Columbus, OH, USA. From 2019 to 2021, he was a Visiting Professor at the Nonlinear RF Laboratory, Department of Electrical and Computer Engineering, OSU. He is currently a professor of electrical engineering with UNAM. His current research interests include antenna arrays, frequency-selective surfaces, and microwave and millimeter wave circuits.

Jorge Rodriguez-Cuevas, Universidad Nacional Autonoma de Mexico. CdMx, 04510, Mexico

J. Rodriguez-Cuevas was born in Mexico City, Mexico. He received his B. S., M. Eng., and Ph.D. degrees in electrical engineering from the National Autonomous University of Mexico (UNAM), Mexico City, Mexico, in 1987, 1995 and 2003, respectively. Furthermore in 2003, he received specialized studies in Microelectromechanical Systems (MEMS) from the National Autonomous University of Mexico (UNAM) and the United States-Mexico Foundation for Science (FUMEC). Since 1987, he has been with the Electronics Engineering Department, UNAM, where he is a professor engaged in research and teaching on telecommunication circuits and systems. His current research interests are phased arrays, RF MEMS and microwave and millimeter-wave circuits.

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Published

2023-09-27

How to Cite

Benitez Zuñiga, I. C. ., Martynyuk, A. E., Martinez-Lopez, J. I., & Rodriguez-Cuevas, J. (2023). In-line Wideband RF MEMS Switch Integrated on PCB Using BCB Planarization. IEEE Latin America Transactions, 21(11), 1218–1226. Retrieved from https://latamt.ieeer9.org/index.php/transactions/article/view/7596

Issue

Vol. 21 No. 11 (2023): Ordinary Issue

Section

Electronics

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