Project of Ceramic Pressure Transducer with Thick Film
Keywords:pressure sensor, think film, alumina substrate
The aim of this work was to develop a pressure
transducer using conductive silver-palladium paste (AgPd), providing a cost reduction in the final product. It was developed a pressure sensor on alumina substrate with conductive tracks of
silver-palladium (AgPd) and ruthenium oxide (RuO2) as sensor elements and piezo resistors, using thick film technology. The AgPd paste sensor withstood over 10 million cycles at 1Hz without any damage. The developed transducer presented linear response
in all working pressure range, even under different temperatures. The results obtained in this project using thick film are interesting for small industries due the low cost of the final product compare
with thin films technique.