Linares Aranda, Mónico, Luis Hernández Martínez, and Javier De la Hidalga Wade. “A Test IC for Wafer-Level Characterization of an IntraCMOS-MEMS Fabrication Process”. IEEE Latin America Transactions 20, no. 1 (August 25, 2021): 108–116. Accessed March 28, 2024. https://latamt.ieeer9.org/index.php/transactions/article/view/5165.