Linares Aranda, Mónico, Luis Hernández Martínez, and Javier De la Hidalga Wade. 2021. “A Test IC for Wafer-Level Characterization of an IntraCMOS-MEMS Fabrication Process”. IEEE Latin America Transactions 20 (1):108-16. https://latamt.ieeer9.org/index.php/transactions/article/view/5165.