LINARES ARANDA, M.; HERNÁNDEZ MARTÍNEZ, L. .; DE LA HIDALGA WADE, J. . A Test IC for Wafer-Level Characterization of an IntraCMOS-MEMS Fabrication Process. IEEE Latin America Transactions, [S. l.], v. 20, n. 1, p. 108–116, 2021. Disponível em: https://latamt.ieeer9.org/index.php/transactions/article/view/5165. Acesso em: 23 apr. 2024.